Name of the Equipment | Spin Rinse Dryer (SRD) |
Group | |
Category | clean |
Operator | |
System Owner | Ajin Raphy ajinraphy@iitb.ac.in |
| Make / Model | SRD-Class One USA Model 2800 |
| Information | No |
| Serial Number | SRD-1088 |
| FootPrint | |
| InstallationDate | 09/19/2018 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | Global Marketing Services 3rd floor, No 1, Sharadanagar, Uttarahalli Main Rd, Vasanthapura, Bengaluru, Karnataka 560061 |
| Actual Dealer | ClassOne Technology, Inc. 109 Cooperative Way Kalispell, Montana 59901 United States tel: +1 406 407 7814 info@ClassOne.com |
| SOP | SOP/135_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets available *Based on stock availability | |
| Precursor/ Target loaded inside tool | 6 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |