Name of the Equipment | Edge Isolation Tool |
Group | Crystalline Silicon Solar Cells |
Category | clean |
Operator | |
System Owner | Ajin Raphy ajinraphy@iitb.ac.in |
| Make / Model | BSET EQ/ NT-2 |
| Information | No |
| Serial Number | 1027 |
| FootPrint | 1.5m x 1m |
| InstallationDate | 10/01/2012 |
| Equipment Type | Dry Etch tools |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | Deesha Enterprises B.S Pai, bspai@vsnl.com |
| Actual Dealer | BSET EQ Plasma Bill Smith, bseteq@comcast.net |
| SOP | SOP/52_SOP.pdf |
| Training & other policy documents | POLICY/52_POLICY.pdf |
| Recipies | RECEPIES/52_RECEPIES.pdf |
| Glimpse | GLIMPSE/52_GLIMPSE.pdf |
| Tool Facilities Requirements | Gases, chiller (if required) |
| Access | Controlled |
| Lab Phone No | 3583 |
| Substrate allowed | Si |
| Substrate Dimension | 125x125mm wafers and 156x156mm wafers |
| Chemical allowed | NA, Si, SiN, SiO2 |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | CF4, SF6, N2 |
| Contamination remarks | Any other sample beyond the mentioned list needs due contamination clearance |