Name of the Equipment | General Purpose Wet bench |
Group | Solar Cells and Materials |
Category | clean |
Operator | |
System Owner | |
| Make / Model | Laxmi Instruments |
| Information | No |
| Serial Number | NA |
| FootPrint | NA |
| InstallationDate | |
| Equipment Type | Wet chemistry tools |
| Location | NCPRE Silicon Metalization Lab |
| AMC | Required |
| Local Dealer | Laxmi Instruments NA |
| Actual Dealer | Kailash NA |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | GLIMPSE/56_GLIMPSE.pdf |
| Tool Facilities Requirements | DI Water, General Water, PN2, GN2 |
| Access | Open |
| Lab Phone No | 3587 |
| Substrate allowed | Si samples |
| Substrate Dimension | N.A |
| Chemical allowed | Solar cell related processing chemicals, Samples within Semi PV Clean category |
| Precursors/ Targets available *Based on stock availability | N.A |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | N.A |
| Gases allowed | PN2, GN2 |
| Contamination remarks | Gold not allowed, Thorough cleaning of bench after specific experiment important. |