Name of the Equipment | FESEM (Imaging) |
Group | |
Category | clean |
Operator | Vikrant Kurmude |
System Owner | NCPRE Admin ncpreit@ee.iitb.ac.in Vikrant Kurmude 30004955@iitb.ac.in |
| Make / Model | Zeiss/ Ultra 55 |
| Information | No |
| Serial Number | ULTRA55-4413 |
| FootPrint | 219 Sq.ft. |
| InstallationDate | 04/29/2013 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE FESEM lab, Room No. 008, Ground floor, DESE building |
| AMC | Required |
| Local Dealer | Carl Zeiss India (Bangalore) Pvt. Ltd. 4th Level, Block-D, NDM-II Building, Netaji Subhash Place, Pitampura, New Delhi- 110 034, India E-mail:delhi@zeiss.co.in E-mail:bhave2009@gmail.com Mr.Vasudev - 8308984300 Mr.Ramesh -830053161 |
| Actual Dealer | Carl Zeiss NTS GmbH Carl-Zeiss-Strasse 56, 73447 Oberkochen, Germany 18001026677/8049405757 |
| SOP | SOP/8_SOP.pdf |
| Training & other policy documents | POLICY/8_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/8_GLIMPSE.pdf |
| Tool Facilities Requirements | Carbon tape, Silver Paste, N2 & Ar gas, Hand gloves, Tissue paper |
| Access | Open |
| Lab Phone No | 3550 |
| Substrate allowed | 6 |
| Substrate Dimension | (2 mm x 2 mm x Z) to (10 mm x 10 mm x Z) [for surface imaging] (4mm x 4 mm x Z) to (8 mm x 8 mm x Z) |
| Chemical allowed | , Powder, Film |
| Precursors/ Targets available *Based on stock availability | |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |