Equipment Details


Name of the EquipmentNew small Environmental chamber-1
GroupModule Reliability
Categoryclean
OperatorKaran Rane
Devan P Vasudevan
Rambabu sugguna
System OwnerRambabu sugguna
P14472@iitb.ac.in

Umang Desai
174116002@iitb.ac.in

Make / Model
Information
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-3
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4450
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks