Equipment Details


Name of the EquipmentXenon chamber
GroupModule Reliability
Categoryclean
Operator
System OwnerRambabu Sugguna
P14472@iitb.ac.in

Sonali Bhaduri
sonalibhaduri@iitb.ac.in

Make / Model
InformationNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-3
AMC Required
Local Dealer

Actual Dealer

SOP SOP/127_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4450
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool1
Target dimension
Gases allowed
Contamination remarks