Equipment Details


Name of the EquipmentXenon chamber
GroupModule Reliability
Categoryclean
OperatorShashwata Chattopadhyay
Baloji Adothu
System OwnerRambabu sugguna
P14472@iitb.ac.in

Baloji Adothu
baloji@iitb.ac.in

Make / Model
Information
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-3
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4450
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks