Equipment Details


Name of the EquipmentSony EL Camera 4
GroupModule Reliability
Categoryclean
Operator
System OwnerAjeesh M V
ajeeshalath@iitb.ac.in

Make / Model
Information
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-1
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4475
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks