Equipment Details


Name of the EquipmentSputtering System
GroupThin Film Materials and Devices
Categoryclean
Operator
System OwnerAnanta Paul
204110005@iitb.ac.in

Vikas Sharma
phyvikas@iitb.ac.in

Make / Model
InformationNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Hybrid Solar Cells lab
AMC Required
Local Dealer

Actual Dealer

SOP SOP/144_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No4481
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks