Equipment Details


Name of the EquipmentSEM EVO 18
GroupCrystalline Silicon Solar Cells
Categoryclean
Operator
System OwnerVishal Ramkar
vishal.ramkar@iitb.ac.in

Make / Model
InformationNo
Serial Number
FootPrint
InstallationDate29/04/2013
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro 1 Lab (Ground Floor, Electrcal Annex Building)
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4417
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool4
Target dimension
Gases allowed
Contamination remarks