Equipment Details


Name of the Equipment2 Inch Phosphorus Diffusion,oxidation Furnace
GroupEducation and Training
Categoryclean
OperatorNilesh Kusher
System OwnerNilesh Kusher
nileshkusher@iitb.ac.in

manisha bansode
manishak@iitb.ac.in

Make / ModelUrjas Energy Solutions
InformationIs used for diffusion and oxidation
Serial NumberModel 3stf
FootPrint
InstallationDate09/10/2014
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE students fabrication lab Second floor, Transit building
AMC Not Required
Local DealerMr. Pradeep Podal

Urjas Energy Solutions Mr. Pradeep Podal : - 9870999679
Actual DealerSame as above

Same as above
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsN2 and O2 cylinder
AccessOpen
Lab Phone No4872
Substrate allowed2" Silicon wafer
Substrate Dimension2" diameter
Chemical allowedNA, NA
Precursors/ Targets available
*Based on stock availability
Phosporous solid sources
Precursor/ Target loaded inside toolNA
Target dimension2" dia
Gases allowedN2 and O2
Contamination remarks