Equipment Details


Name of the EquipmentRTP system
GroupEducation and Training
Categoryclean
OperatorNilesh Kusher
System OwnerNilesh Kusher
nileshkusher@iitb.ac.in

Manisha Bansode
manishak@iitb.ac.in

Make / ModelIndigineous
Information
Serial NumberNA
FootPrint
InstallationDate2015
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE students fabrication lab Second floor, Transit building
AMC Not Required
Local DealerNA

Indigenious Instrument
Actual DealerNA

NA
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsN2 cylinder
AccessOpen
Lab Phone No4872
Substrate allowedSilicon
Substrate Dimension2 inch Silicon
Chemical allowedNo chemicals, Silicon`
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarksclean