Equipment Details


Name of the EquipmentLithography
GroupEducation and Training
Categoryclean
OperatorNilesh Kusher
System OwnerNilesh Kusher
nileshkusher@iitb.ac.in

manisha bansode
manishak@iitb.ac.in

Make / ModelIndigineous
InformationPatterning through masks
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE students fabrication lab Second floor, Transit building
AMC Required
Local Dealer

Holmarc
Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsYellow lamp, Fume hood
AccessOpen
Lab Phone No4872
Substrate allowed2
Substrate Dimension2cm*2cm
Chemical allowedppr, Developer, TMAH, Acetone, IPA,
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedN2 for cleaning sample
Contamination remarksNA