Equipment Details


Name of the EquipmentLithography
GroupEducation and Training
Categoryclean
OperatorNilesh Kusher
System OwnerNilesh Kusher
nileshkusher@iitb.ac.in

Manisha Bansode
manishak@iitb.ac.in

Make / ModelIndigineous
Information
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE students fabrication lab Second floor, Transit building
AMC Required
Local Dealer

Holmarc
Actual Dealer

SOP SOP/25_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsYellow lamp, Fume hood
AccessOpen
Lab Phone No4872
Substrate allowedSilicon and glass
Substrate Dimension2 inch Silicon
Chemical allowedppr, Developer, TMAH, Acetone, IPA, NA
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2 for cleaning sample
Contamination remarksclean