Equipment Details


Name of the EquipmentSpire Sun Simulator
GroupModule Reliability
Categoryclean
Operator
System OwnerRambabu Sugguna
P14472@iitb.ac.in

Yogeswara Rao Golive
164070009@iitb.ac.in

Make / ModelSPI-SUN SIMULATOR 5600SLP
InformationNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-1
AMC Required
Local Dealer

Actual Dealer

SOP SOP/27_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4871
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool4
Target dimension
Gases allowed
Contamination remarks