Equipment Details


Name of the EquipmentEnvironmental chamber (Large size)
GroupModule Reliability
Categoryclean
Operator
System OwnerRambabu Sugguna
P14472@iitb.ac.in

Karan Rane
174076011@iitb.ac.in

Make / ModelBallice BS-4500-WC
InformationNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-2
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4871
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool4
Target dimension
Gases allowed
Contamination remarks