Equipment Details

Name of the Equipment4 Target E Beam Evaporator System
GroupCrystalline Silicon Solar Cells
Categorysemi-clean pv
Operatorjayshree bhajipale
Kalaivani S
Swasti Bhatia
System OwnerKalaivani S

Make / ModelHHV/15F6T
InformationThin film coating system
Serial NumberNA
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerHHV Mumbai

Mr. B.S.C. Bose, HHV Mumbai contact:02225213724
Actual DealerMr. B.S.C. Bose

SOP SOP/47_SOP.pdf
Training & other policy documentsPOLICY/47_POLICY.pdf
Tool Facilities RequirementsN2, Chillar
Lab Phone No4489 Ext Flash 1
Substrate allowedAny solid substrate
Substrate DimensionMin-20mm x 20mm Max-155mm x 155mm
Chemical allowedFor cleaning of the system IPA is used., Si
Precursors/ Targets available
*Based on stock availability
Al, Ag, Ti, Pd, Pt
Precursor/ Target loaded inside toolNA
Target dimensionTargets must be solid form
Gases allowedLiquid N2
Contamination remarksBefore process substrate holder and chamber cleaning is required