Name of the Equipment | 2 inch Boron diffusion |
Group | Crystalline Silicon Solar Cells |
Category | clean pv |
Operator | |
System Owner | Ajin Raphy ajinraphy@iitb.ac.in NCPRE Admin ncpreit@ee.iitb.ac.in |
| Make / Model | Urjas Tube Furnace - 3 STF |
| Information | No |
| Serial Number | NA |
| FootPrint | |
| InstallationDate | 06/29/2015 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | Urjas Energy Solutions Urjas Energy Solutions www.urjas.com Tel:+91 022 28620267 Pradeep Kumar Podal : 9870999679 Devendra Pareek : 8879180221 |
| Actual Dealer | Urjas Energy Solutions Urjas Energy Solutions www.urjas.com Tel: +91 022 28620267 |
| SOP | SOP/110_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | Si |
| Substrate Dimension | 2 inch Maximum, Quarter of 2 inch Minimum |
| Chemical allowed | Boron Dopant Paste, Si |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | N2, O2 |
| Contamination remarks | RCA cleaned wafers are only allowed. The furnace is used for diffusion of screen printed boron dopant paste. |