Name of the Equipment | OE Lab Plasma Asher |
Group | Thin Film Materials and Devices |
Category | tbd |
Operator | |
System Owner | Ajay Kumar Pal 30005406@iitb.ac.in Ayushi tyagi 214110019@iitb.ac.in |
| Make / Model | HARRICK PLASMA/ PDC-32G-2/PDC/FMG-2 |
| Information | No |
| Serial Number | PDC-32G-2 |
| FootPrint | 118 cm x 75.2 cm |
| InstallationDate | 25/09/2014 |
| Equipment Type | Miscellaneous |
| Location | NCPRE Hybrid Solar Cells lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | Harrick Plasma, Inc. Harrick Plasma, Inc. 120 Brindley St. Ithaca, NY USA (607)272 5070 info@harrickplasma.com |
| SOP | SOP/119_SOP.pdf |
| Training & other policy documents | POLICY/1_POLICY.pdf |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | vacuum Pump, Oxygen cylinder gas |
| Access | Controlled |
| Lab Phone No | 3580 |
| Substrate allowed | Si/ Glass/ ITO Glass |
| Substrate Dimension | 1cm to max 2 inch |
| Chemical allowed | IPA only for chamber cleaning., ITO Glass, glass substrate |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | O2 |
| Contamination remarks |