Name of the Equipment | Sputtering System |
Group | Thin Film Materials and Devices |
Category | clean |
Operator | |
System Owner | SURYANARAYAN NAYAK 22d1072@iitb.ac.in Ananta Paul 204110005@iitb.ac.in |
| Make / Model | |
| Information | |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Hybrid Solar Cells lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| SOP | SOP/144_SOP.pdf |
| Training & other policy documents | POLICY/144_POLICY.pdf |
| Recipies | RECEPIES/144_RECEPIES.pdf |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3580 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets available *Based on stock availability | |
| Precursor/ Target loaded inside tool | 3 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |