Name of the Equipment | PECVD 2 |
Group | Crystalline Silicon Solar Cells |
Category | clean |
Operator | |
System Owner | Keerthana Venugopal
30005089@iitb.ac.in
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| Make / Model | |
| Information | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer |
|
| Actual Dealer |
|
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 4456 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
Precursors/ Targets available
*Based on stock availability | |
| Precursor/ Target loaded inside tool | |
| Target dimension | |
| Gases allowed | |
| Contamination remarks | |
