Name of the Equipment | 2 Inch Phosphorus Diffusion,oxidation Furnace |
Group | Education and Training |
Category | clean |
Operator | |
System Owner | |
| Make / Model | Urjas Energy Solutions |
| Information | No |
| Serial Number | Model 3stf |
| FootPrint | |
| InstallationDate | 09/10/2014 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE students fabrication lab Second floor, Transit building |
| AMC | Not Required |
| Local Dealer | Mr. Pradeep Podal Urjas Energy Solutions Mr. Pradeep Podal : - 9870999679 |
| Actual Dealer | Same as above Same as above |
| SOP | SOP/17_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | N2 and O2 cylinder |
| Access | Open |
| Lab Phone No | 3577 |
| Substrate allowed | Silicon |
| Substrate Dimension | 2 inch Silicon |
| Chemical allowed | NA, NA |
| Precursors/ Targets available *Based on stock availability | Phosporous solid sources |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | 2 inch |
| Gases allowed | N2 and O2 |
| Contamination remarks |