Name of the Equipment | RTP system |
Group | Education and Training |
Category | clean |
Operator | |
System Owner | NCPRE Admin
ncpreit@ee.iitb.ac.in
|
| Make / Model | Indigineous |
| Information | No |
| Serial Number | NA |
| FootPrint | |
| InstallationDate | 2015 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE students fabrication lab Second floor, Transit building |
| AMC | Not Required |
| Local Dealer | NA
Indigenious Instrument |
| Actual Dealer | NA
NA |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | N2 cylinder |
| Access | Open |
| Lab Phone No | 3577 |
| Substrate allowed | Silicon |
| Substrate Dimension | 2 inch Silicon |
| Chemical allowed | No chemicals, Silicon` |
Precursors/ Targets available
*Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | N2 |
| Contamination remarks | clean |
