Name of the Equipment | Environmental chamber (Small size) |
Group | Module Reliability |
Category | clean |
Operator | |
System Owner | NCPRE Admin ncpreit@ee.iitb.ac.in |
| Make / Model | Heat & Control |
| Information | No |
| Serial Number | HCS/IIT/1516/03/01 |
| FootPrint | Length= 70cm, Width=70cm, Height= 120cm |
| InstallationDate | 20/03/2016 |
| Equipment Type | Material and structural characterization tools |
| Location | NCPRE Module Lab-2 |
| AMC | Required |
| Local Dealer | Heat & Control system 18/B-205 'Girnar', Swami Samartha Nagar, Andheri (W), Mumbai - 400053. |
| Actual Dealer | HEAT & CONTROL SYSTEMS 18/B-205 'Girnar', Swami Samartha Nagar, Andheri (W), Mumbai - 400053. |
| SOP | SOP/29_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | DI Water |
| Access | Open |
| Lab Phone No | 4871 |
| Substrate allowed | |
| Substrate Dimension | 50cm X 50cm x 50cm |
| Chemical allowed | NA, Sillicon |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | 50cm X 50cm X 50cm |
| Gases allowed | NA |
| Contamination remarks | NA |