Name of the Equipment | Cell line checker |
Group | Module Reliability |
Category | clean |
Operator | |
System Owner | Tarun Sahu
tarun.s@iitb.ac.in
Bhavya Jyothi K Naga
163079019@iitb.ac.in
|
| Make / Model | Togami |
| Information | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Module Lab-1 |
| AMC | Required |
| Local Dealer |
|
| Actual Dealer |
TOGAMI ELECTRIC MFG. CO. LTD. |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3589 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
Precursors/ Targets available
*Based on stock availability | |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks | |
