Name of the Equipment | 4 Target E Beam Evaporator System |
Group | Crystalline Silicon Solar Cells |
Category | semi-clean pv |
Operator | Ajin Raphy |
System Owner | Ajin Raphy ajinraphy@iitb.ac.in |
| Make / Model | HHV/15F6T |
| Information | No |
| Serial Number | NA |
| FootPrint | NA |
| InstallationDate | 05/03/2013 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | HHV Mumbai Mr. B.S.C. Bose, HHV Mumbai contact:02225213724 |
| Actual Dealer | Mr. B.S.C. Bose 02225705719 |
| SOP | SOP/47_SOP.pdf |
| Training & other policy documents | POLICY/47_POLICY.pdf |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | N2, Chillar |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | Any solid substrate |
| Substrate Dimension | Min-20mm x 20mm Max-155mm x 155mm |
| Chemical allowed | For cleaning of the system IPA is used., Si |
| Precursors/ Targets available *Based on stock availability | Al, Ag, Ti, Pd, Pt |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | Targets must be solid form |
| Gases allowed | Liquid N2 |
| Contamination remarks | Before process substrate holder and chamber cleaning is required |