Name of the Equipment | Contamination Study Furnace |
Group | Crystalline Silicon Solar Cells |
Category | semi-clean pv |
Operator | |
System Owner | |
| Make / Model | Urjas Furnace |
| Information | No |
| Serial Number | NA |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE students fabrication lab Second floor, Transit building |
| AMC | Required |
| Local Dealer | Urjas Energy Solutions Pradeepkumar Podal: 9870999679 Devendra Pareek:8879180221 |
| Actual Dealer | |
| SOP | SOP/49_SOP.pdf |
| Training & other policy documents | POLICY/49_POLICY.pdf |
| Recipies | RECEPIES/49_RECEPIES.pdf |
| Glimpse | GLIMPSE/49_GLIMPSE.pdf |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3577 |
| Substrate allowed | Silicon wafer |
| Substrate Dimension | 2 |
| Chemical allowed | NA, Si wafers |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 1 |
| Target dimension | NA |
| Gases allowed | N2, O2 |
| Contamination remarks | Furnace quartz tube usage is restricted to Nickel deposited silicon wafers |