Name of the Equipment | Diffusion Furnace |
Group | Crystalline Silicon Solar Cells |
Category | clean pv |
Operator | Ajin Raphy |
System Owner | Ajin Raphy ajinraphy@iitb.ac.in |
| Make / Model | Protemp SIRIUS/ PRO-2005 |
| Information | No |
| Serial Number | Ref. Tender No. MNRE |
| FootPrint | 20 feet * 4 feet |
| InstallationDate | 06/30/2012 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | Ohm scientific Ohm scientific Dr.Anand Vairagar Chintan patel |
| Actual Dealer | Protemp USA Robert Gray Vice President, Sales & Marketing ProTemp Product, Inc. 3511 Thomas Rd., Unit 4 Santa Clara, CA 95054 Tel: 408-855-8222 x102 Fax: 408-855-8224 www.protempproducts.com |
| SOP | SOP/51_SOP.pdf |
| Training & other policy documents | POLICY/51_POLICY.pdf |
| Recipies | RECEPIES/51_RECEPIES.pdf |
| Glimpse | GLIMPSE/51_GLIMPSE.pdf |
| Tool Facilities Requirements | GN2, N2, O2, Scrubber, exhaust |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | Si |
| Substrate Dimension | 4 inch circular, 5 inch pseudo square, 6 inch pseudo square |
| Chemical allowed | POCl3, BBr3, Crystalline (mono,multi,monolike) Si, solar grade silicon |
| Precursors/ Targets available *Based on stock availability | Silicon |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | 5inch, 6 inch square and pseudosquare wafers |
| Gases allowed | N2, O2 |
| Contamination remarks | Samples have to be RCA cleaned before doing any diffusion run. The furnace processes wafers that are textured and saw damage removed in KOH |