Name of the Equipment | Rapid Thermal Processing (RTP) |
Group | Crystalline Silicon Solar Cells |
Category | semi-clean pv |
Operator | |
System Owner | |
| Make / Model | Allwin 21/AW 610 |
| Information | No |
| Serial Number | TBA |
| FootPrint | 1m x 2m |
| InstallationDate | 01/07/2013 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE students fabrication lab Second floor, Transit building |
| AMC | Required |
| Local Dealer | Mr. Ganga Mr.Hari Nanovision company. Email:ganga@nanovisionapps.com, hari@nanovisionapps.com |
| Actual Dealer | Allwin21 Corp. Allwin21 Corp. Website: http://www.allwin21.com E-Mail: sales@allwin21.com Address: 220 Cochrane Circle, Morgan Hill, CA 95037 Tel.: 1-408-778-7788 Fax: 1-408-904-7168 Cell: 1-408-887-9385 |
| SOP | SOP/64_SOP.pdf |
| Training & other policy documents | POLICY/64_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/64_GLIMPSE.pdf |
| Tool Facilities Requirements | N2, O2, Ar, Water, CDA |
| Access | Controlled |
| Lab Phone No | 3577 |
| Substrate allowed | Si wafers |
| Substrate Dimension | Min dimension 3 inch, Max dimension 6 inch, Also some small pieces but there should not be any metal |
| Chemical allowed | NA, Si wafers with no metal back contact (Othewise specfied) Note: Samples contaminated with Ge, Sr, Cs, Se, Ba, S, Au, Cu, Cd, Zn, Co are strictly prohibited) |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | N2, Ar |
| Contamination remarks | The processed samples will be considered as Na and K contaminated |